Residual Gas Analysis Systems
Residual gas analysis systems (RGA) use mass spectrometry to analyze the composition of gases in vacuum environments and detect any potential contamination. This ensures optimal product quality and process safety. RGA is used in applications like vacuum furnaces or vacuum coating. Our portfolio includes both turnkey and compact solutions.
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产品范围
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深入了解残余气体分析 (RGA) 进行纯度测试
由于分子污染会影响产品的功能，因此随着技术要求的不断提高，快速扩张的市场越来越重视最高水平的清洁度。专业质量保证的关键在于在高真空条件下使用质谱法正确测定脱气率。
多年来，我们一直为客户提供广泛的残余气体分析分析设备组合。测试要求也会随着时间而变化。借助OmniGrade 和 HiCube Neo RGA，我们正在扩展残余气体分析的产品组合，以提供更高水平的价值创造，从而增加客户的利益。
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OmniGrade
Modular system for residual gas analysis
Our OmniGrade is the customized complete solution for cleanliness verification – individually configured and optimized for you. Every test task is different. Our team of experts accesses the full range of Pfeiffer products and uses them to configure the system that best suits your requirements. Not only are the individual components such as quadrupole mass spectrometers, vacuum pumps, chambers, and other individual components selected for your OmniGrade, but the total operating costs and delivery times of the tailor-made, turnkey solution are also taken into account. With our expertise, we can help you achieve test results with the precision you need while minimizing unnecessary effort.
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量身定制的精度
四极杆质谱仪（ PrismaPro或HiQuad Neo）的选择和腔室数量的确定对可实现的检测限有显着影响。在标准系统中有两个室，一个放置测试样品，另一个放置光谱仪。如果需要，该结构可以补充第三个室，即闸室。这避免了测量室受到环境污染并显着减少了表面积。通过烘烤系统，可以对其进行最佳调节，从而进一步提高测量能力。
您的OmniGrade优势
使用模块化系统根据您的需求定制执行
检测限低
全自动测量过程
全球服务网络
根据 GSA 07 1221 和 GSA 07 2221 进行测试
应用
超高真空 (UHV) 中的应用
HiCube Neo RGA
Compact and versatile solution for residual gas analysis
The HiCube Neo RGA system is a compact solution for residual gas analysis. It is easy to use, offering high accuracy as well as sensitivity for precise measurements. The system integrates a HiCube Neo turbomolecular vacuum pump unit and a PrismaPro mass spectrometer, working together to ensure reliable gas analysis. The turbopump generates the high vacuum levels necessary for mass spectrometry, while the PrismaPro is tailored to detect the specific mass range of molecules relevant to your application. This enables accurate identification and analysis of residual gases. The HiCube Neo RGA is an ideal fit for applications ranging from coating to vacuum furnaces.
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Built-in safety for peace of mind
The HiCube Neo RGA can operate in the pressure range from atmosphere to high vacuum. It is equipped with an integrated shut-off valve for precise inlet pressure adjustment. For additional protection, the system features a DigiLine full-range transmitter, which safeguards the mass spectrometer by continuously monitoring the total pressure. If the pressure exceeds safe levels, the transmitter automatically triggers the shutdown of the filament inside the mass spectrometer, preventing damage. This mechanism ensures the system is protected from operating errors and eliminates the need for costly filament replacements, saving on long-term maintenance costs.
Flexible connectivity for all your needs
The HiCube Neo RGA offers both digital as well as analog inputs and outputs, enabling the collection of external data such as pressure or gas flow. This data can then be transferred to external control units, allowing for comprehensive process monitoring.
The integrated HiCube Neo can be intuitively controlled via its touch screen, which not only displays measured values but also shows signals from connected external components like vacuum gauges. This provides full control over your analysis. The PV MassSpec software further enables easy and quick access to your data.
The HiCube Neo RGA can be customized to suit your specific processes. For example, the recipient – the chamber in which vacuum is generated – can be equipped with a heater. This evaporates possible residual gases that may have adsorbed onto the chamber walls. During operation, these trapped gases can gradually release and interfere with measurements, creating an unwanted background signal. By heating the chamber, these residual gases are desorbed and evacuated, reducing contamination and improving the accuracy of your analysis. The system can further be equipped with additional manual inlet valves for greater flexibility in sample handling. Additionally, when mounted on a trolley, the HiCube Neo RGA becomes a mobile solution, allowing for easy transport and use in different locations.
Your HiCube Neo RGA benefits
Cost-optimized solution for gas analysis
User-friendly software
Compact design
Easy operation with touch display
Completely customizable
Turn-key solution (pre-assembled)
关于定制系统
在定制系统领域，我们除了残余气体分析系统之外还可以提供更多服务。我们通过多年的经验积累了对半导体、制药、冶金和新兴市场要求的了解，可用于开发最先进的系统，帮助您在行业中脱颖而出。例如，我们开发了污染管理系统，旨在识别并最大程度地减少污染物，并优化每个阶段的生产流程。通过提高质量和缩短周期时间来提高产量。
泄漏测试任务的部分组装模块
除了自给自足的装置外，我们还提供可集成到您的系统中的模块化解决方案。其中包括我们的泄漏测试模块（简称 LTM），您可以将其集成到您的生产线中进行批量生产。对于预批量生产，它还可以作为单独的测试台进行手动鉴定。客户定制的可配置模块可以涵盖全范围的测试方法和参数，并由我们部分组装。凭借我们在机械和软件集成方面的经验，我们支持客户实施他们的解决方案。
