1.2 Fundamentals

Pressure is defined as the ratio of force acting perpendicular and uniformly distributed per unit area.

Formula 1-3: Definition of pressure

In an enclosed vessel the gas particles perform thermal movements. In their interaction with the vessel wall, the atoms and molecules are subjected to a large number of collisions. Each collision exerts a force on the vessel wall. Where an enclosed gas is not exposed to outside influences, the numerous collisions that take place result in the same pressure occurring at any point within the vessel, no matter where and in what direction the measurement is carried out.

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Figure 1.2: Definition of total pressure

In practice, it is very rare that only one gas is available. Mixtures of different gases are much more common. Each single component of these gases will exert a specific pressure that can be measured independently of the other components. This pressure exerted by the various components is called partial pressure. In ideal gases, the partial pressures of the various components add up to the total pressure and do not interfere with each other. The sum of all partial pressures equals the total pressure.

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Figure 1.3: Definition of partial pressure

An example of a gas mixture is our ambient air. Its partial pressure composition is shown in Table 1.1. [3]

Gas type

Chem. Formula

Volume %

Partial pressure [hPa]

Nitrogen

N2

78.09

780.9

Oxygen

O2

20.95

209.5

Water vapor

H2O

< 2.3

< 23.3

Argon

Ar

9.3·10 -1

9.3

Carbon dioxide

CO2

3.0·10-2

3.0·10-1

Neon

Ne

1.8·10 -3

1.8·10-2

Hydrogen

H2

< 1·10-3

< 1·10-2

Helium

He

5.0·10 -4

5.0·10-3

Methan

CH4

2.0·10-4

2.0·10-3

Krypton

Kr

1.1·10 -4

1.1·10-3

Carbon monoxide

CO

< 1.6·10-5

< 1.6·10-4

Xenon

Xe

9.0·10 -6

9.0 . 10-5

Nitrous oxide

N2O

5.0·10 -6

5.0·10-5

Ammonia

NH3

2.6·10-6

2.6·10-5

Ozone

O3

2.0·10-6

2.0·10-5

Hydrogen peroxide

H2O 2

4.0·10-8

4.0·10-7

Iodine

I2

3.5·10-9

3.5·10-8

Radon

Rn

7.0·10 -18

7.0·10-17

Table 1.1: Composition of atmospheric air. The partial pressures indicated refer to 1,000 hPa. Note: The value indicated for water vapor is the saturated state at 293 K (20°C). The values for carbon dioxide and carbon monoxide fluctuate depending on the place and time. The indication for carbon monoxide is the peak value for a large city. Other sources refer to a natural hydrogen concentration of 5 · 10-5 % and a partial pressure of 5 · 10-4 hPa.

In space, depending on the proximity to galaxies, pressures of under 10-18 hPa prevail. On Earth, technically generated pressures of less than 10-16 hPa have been reported. The range of atmospheric pressure down to 10-16 hPa covers 19 decimal powers. Specifically adapted types of vacuum generation and measurement for the pressure range result in subdivisions of the various pressure ranges as shown in Table 1.2.

Pressure range

Pressure hPa

Pressure Pa

Number density per cm3

Mean free path in m

Atmospheric pressure

1,013.25

101,325

2.7·1019

6.8·10-8

Low vacuum (LV)

300…1

30,000…100

1019…1016

10-8…10-4

Medium vacuum (MV)

1…10-3

100…10-1

1016 …1013

10-4…10-1

High vacuum (HV)

10-3…10-8

10-1…10-6

1013…108

10-1…104

Ultra-high vacuum (UHV)

10-8…10-11

10-6…10-9

108…105

104…107

Extremely high vacuum (XHV)

<10-11

<10-9

<105

>107

Table 1.2: Pressure ranges in vacuum technology

The unit for measuring pressure is the pascal. This unit was named after the French mathematician, physicist, writer and philosopher Blaise Pascal (1623 – 1662). According to Formula 1-3, the SI unit pascal is composed of Pa = N m-2. The units mbar, torr and the units shown in Table 1.3 are common in practical use.

Pa

bar

hPa

µbar

Torr

micron

atm

at

mm WS

psi

psf

Pa

1

1·10-5

1·10-2

10

7.5·10-3

7.5

9.87·10-6

1.02·10-5

0.102

1.45·10-4

2.09·10-2

bar

1·105

1

1·103

1·106

750

7.5·105

0.987

1.02

1.02·104

14.5

2.09·103

hPa

100

1·10-3

1

1,000

0.75

750

9.87·10-4

1.02·10-3

10.2

1.45·10-2

2.09

µbar

0.1

1·10-6

1·10-3

1

7.5·10-4

0.75

9.87·10-7

1.02·10-6

1.02·10-6

1.45·10-5

2.09·10-3

Torr

1.33·102

1.33·10-3

1.33

1,330

1

1,000

1.32·10-3

1.36·10-3

13.6

1.93·10-2

2.78

micron

0.133

1.33·10-6

1.33·10-3

1.33

1·10-3

1

1.32·10-6

1.36·10-6

1.36·10-2

1.93·10-5

2.78·10-3

atm

1.01·105

1.013

1,013

1.01·106

760

7.6·105

1

1.03

1.03·104

14.7

2.12·103

at

9.81·104

0.981

981

9.81·105

735.6

7.36·105

0.968

1

1·10-4

14.2

2.04·103

mm WS

9.81

9.81·10-5

9.81·10-2

98.1

7.36·10-2

73.6

9.68·10-5

1·10-4

1

1.42·10-3

0.204

psi

6.89·103

6.89·10-2

68.9

6.89·104

51.71

5.17·104

6.8·10-2

7.02·10-2

702

1

144

psf

47.8

4.78·10-4

0.478

478

0.359

359

4.72·10-4

4.87·10-4

4.87

6.94·10-3

1

Table 1.3: Conversion table for units of pressure