Residual Gas Analysis Systems
Residual gas analysis systems (RGA) use mass spectrometry to analyze the composition of gases in vacuum environments and detect any potential contamination. This ensures optimal product quality and process safety. RGA is used in applications like vacuum furnaces or vacuum coating. Our portfolio includes both turnkey and compact solutions.
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Product range
Purity testing with in-depth knowledge of residual gas analysis (RGA)
Rapidly expanding markets with ever more stringent technical requirements are placing increasing emphasis on the highest level of cleanliness, as molecular contamination affects the functionality of their products. The key to professional quality assurance lies in correctly determining the outgassing rates using mass spectrometry under high vacuum conditions.
We have been supporting our customers for many years with an extensive portfolio of analysis devices for residual gas analysis. The testing requirements also change over time. With our OmniGrade and HiCube Neo RGA, we are expanding our portfolio of products for residual gas analysis in order to offer a higher level of value creation and thus increase the benefits for our customers.
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OmniGrade
Modular system for residual gas analysis
Our OmniGrade is the customized complete solution for cleanliness verification – individually configured and optimized for you. Every test task is different. Our team of experts accesses the full range of Pfeiffer products and uses them to configure the system that best suits your requirements. Not only are the individual components such as quadrupole mass spectrometers, vacuum pumps, chambers, and other individual components selected for your OmniGrade, but the total operating costs and delivery times of the tailor-made, turnkey solution are also taken into account. With our expertise, we can help you achieve test results with the precision you need while minimizing unnecessary effort.
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Precision made to measure
The selection of the quadrupole mass spectrometer (PrismaPro or HiQuad Neo) and the determination of the number of chambers have a significant influence on the achievable detection limit. In the standard system there are two chambers, one in which the test specimen lies and one in which the spectrometer is located. If necessary, this structure can be supplemented with a third chamber, the lock chamber. This avoids contamination of the measuring chamber from the environment and significantly reduces the background. By baking out the system, it is optimally conditioned, which further increases the measurement capability.
The individual components
Mass spectrometry with PrismaPro or HiQuad Neo
Dry backing pumps
Do you want to know more?
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Your OmniGrade benefits
Execution tailored to your needs using a modular system
Low detection limits possible
Fully automated measuring process
Worldwide service network
Testing according to GSA 07 1221 & GSA 07 2221
Applications
EUV lithography in semiconductor production
Applications in ultra-high vacuum (UHV)
HiCube Neo RGA
Compact and versatile solution for residual gas analysis
The HiCube Neo RGA system is a compact solution for residual gas analysis. It is easy to use, offering high accuracy as well as sensitivity for precise measurements. The system integrates a HiCube Neo turbomolecular vacuum pump unit and a PrismaPro mass spectrometer, working together to ensure reliable gas analysis. The turbopump generates the high vacuum levels necessary for mass spectrometry, while the PrismaPro is tailored to detect the specific mass range of molecules relevant to your application. This enables accurate identification and analysis of residual gases. The HiCube Neo RGA is an ideal fit for applications ranging from coating to vacuum furnaces.
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Built-in safety for peace of mind
The HiCube Neo RGA can operate in the pressure range from atmosphere to high vacuum. It is equipped with an integrated shut-off valve for precise inlet pressure adjustment. For additional protection, the system features a DigiLine full-range transmitter, which safeguards the mass spectrometer by continuously monitoring the total pressure. If the pressure exceeds safe levels, the transmitter automatically triggers the shutdown of the filament inside the mass spectrometer, preventing damage. This mechanism ensures the system is protected from operating errors and eliminates the need for costly filament replacements, saving on long-term maintenance costs.
Flexible connectivity for all your needs
The HiCube Neo RGA offers both digital as well as analog inputs and outputs, enabling the collection of external data such as pressure or gas flow. This data can then be transferred to external control units, allowing for comprehensive process monitoring.
The integrated HiCube Neo can be intuitively controlled via its touch screen, which not only displays measured values but also shows signals from connected external components like vacuum gauges. This provides full control over your analysis. The PV MassSpec software further enables easy and quick access to your data.
The HiCube Neo RGA can be customized to suit your specific processes. For example, the recipient – the chamber in which vacuum is generated – can be equipped with a heater. This evaporates possible residual gases that may have adsorbed onto the chamber walls. During operation, these trapped gases can gradually release and interfere with measurements, creating an unwanted background signal. By heating the chamber, these residual gases are desorbed and evacuated, reducing contamination and improving the accuracy of your analysis. The system can further be equipped with additional manual inlet valves for greater flexibility in sample handling. Additionally, when mounted on a trolley, the HiCube Neo RGA becomes a mobile solution, allowing for easy transport and use in different locations.
Your HiCube Neo RGA benefits
Cost-optimized solution for gas analysis
User-friendly software
Compact design
Easy operation with touch display
Completely customizable
Turn-key solution (pre-assembled)
Speaking of tailor-made systems
In the area of customized systems, we have even more to offer beyond residual gas analysis systems. Our knowledge of the requirements of the semiconductor, pharmaceutical, metallurgical and emerging markets, acquired over many years of experience, goes into the development of state-of-the-art systems that help you assert yourself in your industry. For example, we have developed contamination management systems that aim to identify and minimize contaminants and optimize production processes at every stage. For higher yields through improved quality and shorter cycle times.
Partially assembled modules for leak test tasks
In addition to self-sufficient units, we also offer modular solutions that you can integrate into your system. This includes, among others, our leak test module (LTM for short), which you can integrate into your production line for series production. For pre-series production, it is also available as an individual test stand for manual qualification. The customer-specific configurable modules can cover the full range of test methods and parameters, and are partially assembled by us. With our experience in mechanical and software integration, we support our customers in implementing their solution.
