HiPace® 2800 IUT with TC 1200, DN 250 ISO-F

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check_circleMounting orientation: 90° – 180° (HV flange bottom)

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Ideal for ion implantation systems
Optimized pumping speed for light gases
The nickel-plated rotor guarantees resistivity to the dopants used
The intelligent temperature management system reduces process condensation and deposits
Semi S2 and UL/CSA certification

Ideal for ion implantation systems
Optimized pumping speed for light gases
The nickel-plated rotor guarantees resistivity to the dopants used
The intelligent temperature management system reduces process condensation and deposits
Semi S2 and UL/CSA certification