HiPace® 60 P with TC 110, DN 63 ISO-K

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  • Small yet powerful turbo molecular pump without Holweck-stage with a pumping speed of up to 64 l/s for N2
  • TC 110 integrated electronic drive unit
  • Installation in any orientation
  • Simple and reliable system integration
  • Insensitive to dust
  • Extensive accessories expand the range of applications

  • Small yet powerful turbo molecular pump without Holweck-stage with a pumping speed of up to 64 l/s for N2
  • TC 110 integrated electronic drive unit
  • Installation in any orientation
  • Simple and reliable system integration
  • Insensitive to dust
  • Extensive accessories expand the range of applications