Valves

Protects vacuum systems from over pressures, No safety component in terms of the machinery directive 2006/42/EC, Opening pressure with nut in middle position approx. 400 hPa, The opening pressure can vary by more than +/- 50 hPa and shows a hysteresis., For valves not actuated for a period of time, initial cracking pressure may be higher than the set cracking pressure., Please observe the maximum flow rate., Tightness at 1000 hPa differential pressure, An exhaust hose can be attached to the KF connection at the outlet side

This device is used to reduce the purge gas flow rate in some processes, Used with pumps equipped with purge valve, Flow reduction to 50 sccm

Purge valve kit for ATH 500 M only (not used for MT version), The valve is driven by the customer, Driven by 24 V DC signal

The gas purge provides protection to the pump bearing, Recommended for corrosive applications, The purge of this valve may be isolated during an air tightness test, 50 sccm

Reliably prevents harmful substances from entering the engine and bearing area, Suitable for all HiPace turbopumps, G 1/8" connection, Valve is normally closed

Reliably prevents harmful substances from entering the engine and bearing area, Suitable for HiPace 2800/3400 with TC 1200, G 1/8" connection, Valve is normally closed, Connects with M12 plug directly to accessory outputs of electronic drive unit

Reliably prevents harmful substances from entering the engine and bearing area, Suitable for HiPace 2800/3400 with TC 1200, G 1/8" connection, Valve is normally closed, Connects with M12 plug directly to accessory outputs of electronic drive unit

Reliably prevents harmful substances from entering the engine and bearing area, Suitable for HiPace 30/60/80 and SplitFlow 50 with TC 110, G 1/8" connection, Valve is normally closed, Can be directly connected with a M8 plug to the accessory outlets from the connection cable, TCS 12/13 as well as TC 110 with interface (PB, E74, RS)

Reliably prevents harmful substances from entering the engine and bearing area, Suitable for HiPace 300 with TC 110/120, G 1/8" connection, Valve is normally closed, Can be directly connected with a M8 plug to the accessory outlets from the connection cable, TCS 12/13 as well as TC 110/120 with interface (PB, E74, RS)