Vacuum pumps

Ideal for ion implantation systems, Optimized pumping speed for light gases, The nickel-plated rotor guarantees resistivity to the dopants used, The intelligent temperature management system reduces process condensation and deposits, Semi S2 and UL/CSA certification

Ideal for ion implantation systems, Optimized pumping speed for light gases, The nickel-plated rotor guarantees resistivity to the dopants used, The intelligent temperature management system reduces process condensation and deposits, Semi S2 and UL/CSA certification

Small yet powerful turbopump with a pumping speed of up to 32 l/s for N2, Highest compression in this pumping speed class, Simple integration into small analytical systems, Low weight, ideal for portable applications, Long maintenance intervals for a long life cycle, For installation in any orientation, TC 80 integrated electronic drive unit, Extensive accessories expand the range of applications

Small yet powerful turbopump with a pumping speed of up to 32 l/s for N2, Highest compression in this pumping speed class, Simple integration into small analytical systems, Low weight, ideal for portable applications, Long maintenance intervals for a long life cycle, For installation in any orientation, TC 80 integrated electronic drive unit, Extensive accessories expand the range of applications

Small yet powerful turbopump with a pumping speed of up to 32 l/s for N2, Highest compression in this pumping speed class, Simple integration into small analytical systems, Low weight, ideal for portable applications, Long maintenance intervals for a long life cycle, For installation in any orientation, TC 80 integrated electronic drive unit, Extensive accessories expand the range of applications