Dry Screw Vacuum Pumps

A dry screw vacuum pump offers high pumping speeds and contamination-free vacuum generation. These benefits make it a vital component in semiconductor manufacturing. The working principle of a dry screw vacuum pump can be explained in three steps:

1. Inlet:

Dry screw vacuum pumps from Pfeiffer Vacuum+Fab Solutions are operated at leading semiconductor fabs. Their operating principle based on our innovative screw technology makes them perfect for various processes in this industry. Several key features and benefits are:

1. Low maintenance requirements: Screw vacuum pumps operate contact-free during compression. This means that the screw rotors do not come into contact with each other or the housing of the pump. This minimizes wear and maintenance needs, ensuring high uptime.

2. Oil-free operation: Dry vacuum pumps do not require operating fluids like oil in the compression chamber. Clean vacuum generation is crucial in semiconductor applications where contamination must be avoided to ensure highest product quality and precision.

3. Temperature control: Dry screw vacuum pumps are equipped with an efficient water-cooling system. This feature allows an even temperature distribution throughout the pump’s body and prevents overheating. Heat from compression is spread over the whole pump body and thermal stability in semiconductor manufacturing processes is ensured. A potential benefit of this stability is preventing process gases from condensing inside the vacuum pump, which reduces the risk of contamination.

4. High pumping speed and throughput: Dry screw vacuum pumps offer excellent running qualities, high pumping speeds and large throughputs. These are necessary for various semiconductor applications, from load lock chambers to particle-generating processes like metal etching.

5. Adaptability to aggressive gases: Semiconductor manufacturing includes applications like etching. These processes rely on toxic gases such as chlorine. Screw vacuum pumps can handle these gases effectively, thanks to their single-piece casting. It avoids any gaps and makes it impossible for these gases to reach the inside of the pump. Consequently, corrosion is prevented.

6. Low noise level: Due to their patented self-balancing screw design, these vacuum pumps ensure low vibration and quiet operation. Low noise levels are essential for the sensitive processes involved in semiconductor manufacturing.

All these features make dry screw vacuum pumps like the COBRA Semicon series from Pfeiffer a reliable solution for all kinds of applications in semiconductor manufacturing. They offer powerful, energy-efficient, and contamination-free vacuum performance.

Yes, screw vacuum pumps are highly compatible with modern semiconductor systems. They are designed to handle the demanding requirements of semiconductor applications, such as metrology, lithography, and wafer processing.

Screw vacuum pumps, like the COBRA Semicon from Pfeiffer, offer high efficiency, low energy consumption, and high tolerance to vapors and particles. All these benefits make screw vacuum pumps perfect for semiconductor applications. Their oil-free compression ensures contamination-free vacuum generation. This clean environment is essential for maintaining the purity required in semiconductor fabs.

Several factors must be considered when selecting the right vacuum solution for semiconductor applications. These factors vary depending on the specific processes involved, such as wafer handling, CVD, or ALD.

Contact us to discuss which vacuum solution best suits your requirements. Our experts are ready to assist you!

For other industrial applications, screw vacuum pumps from Busch Vacuum Solutions provide reliable and efficient vacuum generation. Visit Busch Vacuum Solutions to learn more.