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Diaphragm Vacuum Pumps

Our products Operating principle

Dry solution for analytical, industrial, and chemical applications

Diaphragm vacuum pumps generate vacuum by moving a flexible membrane, known as a diaphragm, up and down. Additionally, this diaphragm also hermetically seals the compression chamber from the motor, preventing the pumped medium from being contaminated by the gear oil.

Thanks to their compactness, diaphragm vacuum pumps are ideal for integration into smaller analytical systems like leak detectors or mass spectrometers and as backing pumps for turbomolecular vacuum pumps .
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Types of diaphragm vacuum pumps

Diaphragm pumps from Pfeiffer generate dry, contamination-free vacuum. They come with two, three, or four stages. Models with fewer stages provide higher pumping speeds for faster evacuation. Those with more stages achieve lower ultimate pressures because each additional stage compresses the pumped medium further, allowing the pump to generate higher vacuum levels.

Additionally, some diaphragm vacuum pumps from Pfeiffer are available with direct current (DC) motors. These motor versions consume over 80% less energy than the drive units of standard diaphragm vacuum pump models.

Product
Nominal pumping speed
MVP 003
0.25 m3/h
MVP 010
0.6 m3/h
MVP 015 Neo
0.75 - 1 m3/h
MVP 020
1.4 m3/h
MVP 030
1.8 m3/h
MVP 040
2.5 m3/h
MVP 070
4.3 m3/h
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The dry solution for chemically resistant operation

MVP

Applications

Diaphragm vacuum pumps are suitable for a wide range of industrial applications, like coating, vacuum filtration, or vacuum distillation . Their compact design and dry, contamination-free compression make them ideal as backing pumps for turbomolecular vacuum pumps or for integration into analytical systems such as mass spectrometers . Versions with carbon-reinforced special diaphragms and corrosion-resistant housing are available for pumping corrosive gases, for example in coating processes.

Each industry and application has unique requirements. To determine the most suitable vacuum solution for your specific needs, contact our experts.

Your application is not listed? Explore our product finder for more options!

Vacuum pump units with diaphragm vacuum pumps

Pfeiffer also offers vacuum pump units that combine turbomolecular with diaphragm vacuum pumps as backing pumps.

Equipped with turbopumps, these units are ideal for applications requiring high to ultra-high vacuum, such as gas analysis. They feature a user-friendly touch display that allows for process monitoring as well as measurement data recording.

Vacuum pump units
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FAQ

What is a diaphragm vacuum pump?

A diaphragm vacuum pump is a positive displacement pump that generates oil- and hydrocarbon-free vacuum. It generates vacuum by moving a diaphragm up and down via a connecting rod attached to a crankshaft. The clean vacuum generation of diaphragm vacuum pumps makes them ideal in sensitive environments like inside leak detection systems or as backing pumps for turbomolecular vacuum pumps.

How does a diaphragm vacuum pump work?

Diaphragm vacuum pumps provide reliable and oil-free operation by using a flexible diaphragm to generate vacuum. The pump itself consists of a cylinder in which a diaphragm moves up and down. It seals off the compression chamber from the drive unit. The inlet and outlet valves are pressure controlled. The diaphragm is linked to a connecting rod that is attached to a crankshaft. Powered by an electrical motor, the crankshaft rotates, moving the diaphragm when the pump is running.

Here is a step-by-step outline of its operating principle:

1. Inlet:

  • The crankshaft-driven connecting rod moves the diaphragm down, increasing the volume in the compression chamber.
  • This increase in volume leads to a decrease in pressure.
  • As gases move from areas with higher to areas of lower pressure, the pumped medium enters the pump through the inlet.

2. Compression:
  • The crankshaft continues its motion, pushing the diaphragm upward.
  • This reduces the volume in the suction chamber, compressing the pumped medium.
  • The compressed pumped medium is forced out through an outlet valve.

3. Exhaust:
  • The pumped medium exits through the outlet valve.
  • The cycle repeats as the diaphragm moves up and down.

Diaphragm vacuum pumps are ideal for applications requiring an uncontaminated and clean vacuum environment, such as laboratories, analytics, and the chemical industry. They are also known for their long diaphragm lifetime, low vibration and noise, high operating safety, and easy maintenance.

What are the advantages of oil-free diaphragm pumps?

Diaphragm pumps are an ideal choice for application in research and development or various industrial settings requiring clean vacuum. They offer several benefits:

  • Oil-free operation: Diaphragm vacuum pumps operate oil- and hydrocarbon-free and do not create any particles. This eliminates the risk of contamination, ensuring clean vacuum generation.
  • Corrosion-resistant materials: Diaphragm vacuum pumps designed for corrosive applications feature coated diaphragms and corrosion-resistant housings. This ensures that the components of the vacuum pump are protected against aggressive gases during processes like physical vapor deposition
  • Reliable operation: Two-stage diaphragm vacuum pumps are equipped with a magnetic gas ballast valve, which enhances water vapor compatibility. This feature increases process reliability and durability.
  • Hermetically sealed design: The diaphragm inside the vacuum pump functions as hermetic seal between the compression chamber and the drive unit, preventing aggressive gases from corroding the mechanical parts.
  • Low vibration and noise levels: In sensitive environments such as clean rooms, diaphragm pumps are not only reliable, but also have low vibration and noise levels. Noise levels are typically less than 50 dB(A).
  • Easy maintenance: These vacuum pumps are designed for easy diaphragm and valve exchange, simplifying maintenance and reducing downtime.
  • Dual voltage motors: The availability of dual voltage motors or DC drives allows for worldwide usage, accommodating different electrical standards and ensuring versatility in various industrial settings.
These attributes make diaphragm vacuum pumps highly effective and reliable for a variety of applications. They also perform reliably with corrosive gases, ensuring long service life and consistent performance.

What is the role of diaphragm pumps for leak detection?

Diaphragm vacuum pumps are preferred in leak detection technology due to their exceptional performance in handling light gases, particularly helium. Here are the key reasons:

  • Excellent pumping speed for light gases: Diaphragm vacuum pumps offer a very good pumping speed for light gases like helium.
  • Stable backing vacuum pressure: They help maintain the required backing vacuum pressure of turbopumps used in helium leak detector technology, ensuring consistent and reliable leak detection.
  • Regeneration capability: These vacuum pumps support the regeneration capability of leak detectors, enhancing their efficiency and accuracy.
  • Low noise and vibration: Diaphragm pumps from Pfeiffer operate below 50 db(A), ensuring a comfortable working environment.
  • Reduced power consumption: Diaphragm vacuum pumps are highly efficient, resulting in extremely low power consumption.
  • Light weight and compact: Their lightweight and compact design makes diaphragm vacuum pumps ideal for integration into increasingly small analytical systems and turbomolecular pumping stations, as well as for mobile applications.

These attributes make diaphragm vacuum pumps indispensable in the field of leak detection, providing reliable and efficient performance in various applications.

How should diaphragm pumps be maintained?

Generally, diaphragm vacuum pumps have low maintenance requirements and provide high reliability. However, in every vacuum pump, certain components are exposed to wear. In diaphragm vacuum pumps, the diaphragms and valves are among the parts subject to wear. They are made of an elastomer that ages over time and thus becomes porous. Stress during operation also puts strain on the plastic, causing abrasion and porosity. It is recommended to replace both components approximately every two years to ensure maximum performance of your vacuum pump.

This replacement can easily be done by the operator. You do not need special tools, just the revision set containing a new diaphragm and valves. The set and any additional information on the process itself can be found on our service page.

What kind of accessories does Pfeiffer offer for vacuum diaphragm pumps?

Pfeiffer also offers a comprehensive range of accessories for its diaphragm pumps. This is because special tasks require the use of complementary parts or components. Special power cords are just as much a part of the range as the universal OmniControl operating unit, purge gas nozzles, hose connections or relay boxes.